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        TEL：
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        EQUIPMENT
        Technological innovation Professional services
        

        


	

        
  
        
	
        
		
	
        
    
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					VACUUM PUMPING SYSTEM
        
					? Low Vacuum Pump:oil Rotary Pump [Mechanical Booster Pump:930m3h-1 Combination Type]
        
					High Vacuum Pump:oil Diffusion Pump 12000l/sce [Option:cryo-pumps OrTurbo Molecular Pumps]
        
					
        
					? VACUUM VALVES SYSTEM
        
					Type:3/8",2",4",22"
        
					
        
					? CHAMBER HEATING SYSTEM
        
					Max Temperatuer:0 To 400℃
        
					Type:halogen Lamp [Option:micro-sheathe Heater]
        
					Substrate Type:Dome Or Planetary
        
					Rotation Speed:0 To 30rpm
        
					Soft Start Soft Stop And Speed Can Be Changed
        
					
        
					? ELECTRON CONTROL SYSTEM
        
					Type: Pamel PC
        
					Modify And Change Any Desired Control
        
					Full Comtrol The Coater To Meeet And Perform The Ultimate Desired End Products
        
					Technical lnformation ls Available
        
					
        
					? VACUUM GAUGE SYSTEM
        
					High Vacuum Sensor:2
        
					Low Vacuum Sensor:1        		
				
					OPTIONAL
        
					? THIN FILM DEPOSITION CONTROLLER SYSTEM
        
					Deposition Control:ic-5 [Inficon]
        
					Mdc360[Maxtek] Etc.
        
					Quartz Crystal Sensor:1,2,6 Head[s]
        
					
        
					? OPTIONAL MONITOP & CONTROLLER LON BEAM SOURCE
        
					Grid Less Type:DC
        
					Girded Type:DC,RF
        
					
        
					? ELECTRON BEAM SOURCE
        
					Capacity:15cc,25cc,4Occ Etc
        
					Deflection Angle:180° Or 270°
        
					Crucible Pocket:4,6,8 Etc.
        
					
        
					? POLY COLD
        
					Defrost Chamber[Only]
        
					Diffusion Pump [Only]
        
					
        
					? WATER COOLING SYSTEM
        
					Water Or Air Cooling Chiller
        
					
        
					         		
			
        
		        
	
        

        

        
  
        
  
        

        











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