PERSONMr. Cheng
18816588806
TEL0510-88769360? 
FAX0510-88769196
WEBwww.aksoft.com.cn
E-MAILCL@jsvltvac.com
ADDNo. 11, Nongke Team Road,
Binhu District, Wuxi City?
Copy right ? 2021 Jiangsu VLT Vacuum Equipment Co., Ltd. All rights reserved
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Optical Coating machine
Optical Coating machine
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VACUUM PUMPING SYSTEM ? Low Vacuum Pump:oil Rotary Pump [Mechanical Booster Pump:930m3h-1 Combination Type] High Vacuum Pump:oil Diffusion Pump 12000l/sce [Option:cryo-pumps OrTurbo Molecular Pumps] ? VACUUM VALVES SYSTEM Type:3/8",2",4",22" ? CHAMBER HEATING SYSTEM Max Temperatuer:0 To 400℃ Type:halogen Lamp [Option:micro-sheathe Heater] Substrate Type:Dome Or Planetary Rotation Speed:0 To 30rpm Soft Start Soft Stop And Speed Can Be Changed ? ELECTRON CONTROL SYSTEM Type: Pamel PC Modify And Change Any Desired Control Full Comtrol The Coater To Meeet And Perform The Ultimate Desired End Products Technical lnformation ls Available ? VACUUM GAUGE SYSTEM High Vacuum Sensor:2 Low Vacuum Sensor:1 |
OPTIONAL ? THIN FILM DEPOSITION CONTROLLER SYSTEM Deposition Control:ic-5 [Inficon] Mdc360[Maxtek] Etc. Quartz Crystal Sensor:1,2,6 Head[s] ? OPTIONAL MONITOP & CONTROLLER LON BEAM SOURCE Grid Less Type:DC Girded Type:DC,RF ? ELECTRON BEAM SOURCE Capacity:15cc,25cc,4Occ Etc Deflection Angle:180° Or 270° Crucible Pocket:4,6,8 Etc. ? POLY COLD Defrost Chamber[Only] Diffusion Pump [Only] ? WATER COOLING SYSTEM Water Or Air Cooling Chiller |
PERSONMr. ChengTEL0510-88769360? FAX0510-88769196WEBwww.aksoft.com.cnE-MAILCL@jsvltvac.comADDNo. 11, Nongke Team Road,